3D Optical Profiler

Non-Contact Nano-depth 3D Surface Profiler

(Scanning White-light Interferometric Microscope)

Features:

• 0.1nm resolution in height/depth
• Micro-3D Depth Inspection
• High-speed/ Non-contact area alanysis
• Non-electron beam/Non-laser
• Transparent material is also suitable 
• Surface profile/ roughness analysis

Applications:

Nano-depth 3D profile fast presents. Carmar's SWIM-1510MS designs with the latest scanning white-light interferometric technology. Outstanding performance with simple operation, customer design flexibility and high-precision scanning, the Micro-3D profile and surface texture can be done by non-contact and non- constructive operation in normal environment. Moreover, nano-level surface roughness and step height calculation are traced to ISO International standardization. 

Powerful SWIM series white-light Interferometer can acquire the scanning data of FOV in a few seconds. 3D profile and height inspection results obtaining is better than point to point con-focal microscope. The 3D graphic measuring ability is better than scanning electron microscope.

No matter the polishing, rough layer, or even the transparent material can be inspected by SWIM as long as the reflection rate of measured object is over 1%. SWIM is suitable for the inspections of surface profiles and micro-structure for all kinds of materials and components. The applications are as below:

•  Glass lens

•  Coating surface

•  Semiconductor Wafers

•  Data Storage Surface (HDD, DVD, CD)

•  MEMS Components

•  LCD

•  high-density interconnect PCB

•  IC  Package

•  Micro Mechanical Parts and analysis and surface research of other materials and Precision Machined Surface.

Vertical Phase Shift Interferometry scanning technology, depth resolution can reach 0.1nm

SWIM series provides Vertical Resolution: 0.1 nm, Lateral Space Resolution: 0.61nm(50X lens) with max vertical scanning speed can go up to 12μm/s.  The ability of high speed presentation of 3D Micro-Profile is necessary tool for research, RD, and quality check for production.