Type
Coating Production Line
Machine Type
Film preparation and production
Video outgoing-inspection
Provided
Machinery Test Report
Provided
Marketing Type
New Product 2020
Warranty of core components
1 Year
Core Components
PLC, Engine, Bearing, Motor, Pump
Key Selling Points
High-accuracy
Applicable Industries
Machinery Repair Shops, Manufacturing Plant, Food & Beverage Factory, Retail, Energy & Mining, Advertising Company
Dimension(L*W*H)
customized
Wafer Dimension
8 inch and below
Wafer Temperature
Rt-500c,Controlling Precision +-0.1c
Number of precursor
Two precursor lines,optional more lines
Temperature of precursor lines
RT-200℃,Controlling precision ±0.1℃
ALD Valve
Swagelok ALD swift valve
Background vacuum
<5*10-3Torr
Gas carrier system
N2 or Ar
After Warranty Service
Video technical support, Online support
Local Service Location
None