In spite of semi-in-lens SEM, in-lens SEM equivalent specification has been realized.
In spite of semi-in-lens SEM, in-lens SEM equivalent specification has been realized.Observation for standard 6inch or maximum 8inch (Option) waferWider non-destructive observation Image observation for various purposes is performed by the super ExB that is selectable information switch for signals from one detector Ultra low acceleration voltage observation from 100V by retarding function (Option)(For ArF resist, low-k film observation.)
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| Product/Service (We Sell): | CD-Measurement SEM |
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