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TS series of box-type magnetron sputtering vacuum coating machine(vacuum coater,vacuum equipment,vacuum machine)

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Product Details

Applications: Plating for decorative coatings, alloy film, superconducting materials, solar cells or the tool, mold on the surfa

Model		TS-900CJX	TS-1000CJX	TS-1250CJX	TS-900LDM
Applications		Decorative metal coating	Decorative metal coating	Decorative metal coating	Tool & Die coating
Chamber	Chamber volume	900×900×1000mm	1000×1000×1000mm	1250×1250×1400mm	900×900×1100mm
Chamber	Structure	Box-type,pre-open door	Box-type,pre-open door	Box-type,pre-open door	Box-type,pre-open door
Carrier	Rotary speed	1-15rpm	1-15rpm	1-10rpm	1-10rpm
Carrier	Substrate carrier	Revolution or planetary	Revolution or planetary	Revolution or planetary	Revolution or planetary
Coating mode	Power supply	DC or MF	DC or MF	DC or MF	DC or MF
Coating mode	Target	Rectangular or circular	Rectangular or circular	Rectangular or circular	Rectangular or circular
Gas charging system		Pressure controller+MFC	Pressure controller+MFC	Pressure controller+MFC	Pressure controller+MFC
Other optional components		Muti-arc source, Ion source, heating system,film thickness monitor etc.	Muti-arc source, Ion source, heating system,film thickness monitor etc.	Muti-arc source, Ion source, heating system,film thickness monitor etc.	Muti-arc source, Ion source, heating system,film thickness monitor etc.
Controlling mode	Automatic	PLC or IPC	PLC or IPC	PLC or IPC	PLC or IPC
Controlling mode	Manual	Manual	Manual	Manual	Manual
Pump system	Vacuum recovery	5×10^-3Pa20min	5×10^-3Pa20min	5×10^-3Pa20min	5×10^-3Pa20min
Pump system	Ultimate pressure	5×10^-4Pa	5×10^-4Pa	5×10^-4Pa	5×10^-4Pa

Ms. Connie Zeng

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