Multi-arc ion coating machine

    This type disposes the column target or plane magnetism in the multi-arc ion film plating machine's foundation controls the target, the equipment has Gao who the ion plates Li melting rate, the high deposition rate characteristic, simultaneously also has magnetism to control the sputtering low temperature, the stable merit, suitable to plate each kind of compound film, may achieve the compound film disposable to complete, the film has the very high binding force, degree of hardness, the wear-resisting coefficient, the especially qualify clock and watch, the hardware cutting tool, handicraft factory's IPG, IPS, the cutting tool adulterate, the compound film preparation.

   Technical parameter:

   vacuum tank body: The main specification has 800*1000mm, 1000*1200mm, and may design non-sign product according to the customer specific request

    the jig way: Uses the male rotation planet type gear structure, the work piece speed in 1-15 revolution of/minute adjustable

   the control gas way: Uses the mass flowmeter control, the air admission is stable, reflection speed quick   

   target: Uses the whole technique of manufacture, the strict meticulous magnetic field design and the magnetic field layout, the sputtering sculpture is even.

   power source: The disposition has the high frequency direct-current power supply (specifications and so on 20KW, 40KW), the direct-current pulse power source (voltage, dutyfactor to be possible adjustment), the contravariant electric arc power source, and may act according to the actual situation addition ion source and so on ancillary facilities.

   pulls out the vacuum parameter: From the atmosphere pulls out to 5*10³Pa≤15min limit vacuum degree 8*104Pa control system        

   pumping air system: Mainly provides the KT-600 Lanzhou proliferation pump. Provides ZJ600 Luo Cibeng as well as 2X-70 turns on lathe piece pump each one. Other non-sign product acts according to its vacuum chamber size to determine provides vacuum air-bleed set. May also need to provide and so on molecular pump according to the customer