Detailed Product Description

NanoFab 100 is a modular platform, which is developed to assemble nanotechnology facilities (NTF) with the cluster arrangement of their modules, including systems that are capable of treating substrates as big as 100 mm using batch and local techniques. The NTF clusters are linked into the technology chain by means of special intermediate modules, which are used both to transport and to store samples. All this makes it possible to assemble Nano Factories to fabricate fully functional nano-structures, nano-devices and nano-systems.  

   Fields of application of the NTF NANOFAB 100 cover almost all areas of the nanotechnology research and development that are linked with solid-body nano-materials, nano-structures and nano-devices. The spectrum of NANOFAB 100s capabilities expands from fundamental research to the development of single technology methods and to modeling nano-electronics devices. In addition, the employed scheme of arrangement, the control system and the well-developed transport system of the NANOFAB 100 make it possible to use the NTF for low quantity production of nano-structures and nano-devices. The coordinate-linked system of substrate positioning makes it possible to create complex multicomponent 3D nano-devices by using sequential nanotechnology operations with the nanometer resolution. The NTF NANOFAB 100s area of applications has especial significance for the development of modern silicon electronics, which has already become part of practical nano-electronics.