核心组件
PLC, 发动机, 电机, 压力容器, 泵
适用行业
生产车间, 其它, Lab, Research
Cooling Method
Water Cooling+Chamber Air Cooling
Gas Channel
4MFC Maximum Flow:H2: 1000sccm,CH4:100sccm,O2:20sc
Reactor Materials and Structures
Double-Layer Water-Cooled Stainless Steel
Microwave Frequency
2450±25MHz
Power Output Power
Equipped with 10kw Domestic Microwave Power Supply
Gas Supply System
Gas Flow Flowmeter
Operating Pressure Range
10-250torr
Microwave Reflection Protection
Circular,Water Load
Sample Table Size
Molybdenum Stage 85mm
Working Temperature
300-1300 degree