






Attributes
+/-0.5%accuracy
Gas, AirMedium
Mass Flow Controller/Flow Metertype
Beijing, Chinaplace of origin
FlangeConnectivity
2SCCM~6000SLMFlow Rate
material:mass flowmeter
Measurement Range:2SCCM~6000SLM
model number:ACU20FD-L
brand name:ACCU
customized support:ODM, OEM, OBM, Software Reengineering
warranty:2 Years
Range:Controller:2SCCM ~ 6000SLM Flow meter:2SCCM ~ 6000SLM
Accuracy:± 0.5%F.S (full scale)
Linear:± 0.25%F.S
Repeatability:± 0.2%F.S
Response time:Controller:<0.2s Flow meter:<0.1s
Temperature coefficient:± 0.025%F.S/℃
Working temperature:0~50 ℃
Maximum withstand voltage:3MPa/10MPa
Leakage rate:1X10 Pa m3/S
accuracy:±0.5%
Selling Units:Single item
Single package size:XX cm














