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2025 Mass Flow Controller Mass Flow Meter Supporting Semiconductor Gas Delivery Systems

Attributes

+/-0.5%accuracy
Gas, AirMedium
Mass Flow Controller/Flow Metertype
Beijing, Chinaplace of origin
FlangeConnectivity
2SCCM~6000SLMFlow Rate
material:mass flowmeter
Measurement Range:2SCCM~6000SLM
model number:ACU20FD-L
brand name:ACCU
customized support:ODM, OEM, OBM, Software Reengineering
warranty:2 Years
Range:Controller:2SCCM ~ 6000SLM Flow meter:2SCCM ~ 6000SLM
Accuracy:± 0.5%F.S (full scale)
Linear:± 0.25%F.S
Repeatability:± 0.2%F.S
Response time:Controller:<0.2s Flow meter:<0.1s
Temperature coefficient:± 0.025%F.S/℃
Working temperature:0~50 ℃
Maximum withstand voltage:3MPa/10MPa
Leakage rate:1X10 Pa m3/S
accuracy:±0.5%
Selling Units:Single item
Single package size:XX cm

Service

Free replacement parts
View details

Key attributes

accuracy
+/-0.5%
Medium
Gas, Air
type
Mass Flow Controller/Flow Meter
place of origin
Beijing, China
Connectivity
Flange
Flow Rate
2SCCM~6000SLM
material
mass flowmeter
Measurement Range
2SCCM~6000SLM
model number
ACU20FD-L
brand name
ACCU
customized support
ODM, OEM, OBM, Software Reengineering
warranty
2 Years
Range
Controller:2SCCM ~ 6000SLM Flow meter:2SCCM ~ 6000SLM
Accuracy
± 0.5%F.S (full scale)
Linear
± 0.25%F.S
Repeatability
± 0.2%F.S
Response time
Controller:<0.2s Flow meter:<0.1s
Temperature coefficient
± 0.025%F.S/℃
Working temperature
0~50 ℃
Maximum withstand voltage
3MPa/10MPa
Leakage rate
1X10 Pa m3/S
accuracy
±0.5%

Packaging and delivery

Selling Units
Single item
Single package size
XX cm

Lead time

Customization options

Customized logo (Min. order: 1 piece)
Customized packaging (Min. order: 1 piece)
Graphic customization (Min. order: 1 piece)
View details

Product descriptions from the supplier

1 - 4 pieces
$1,079
>= 5 pieces
$1,019

Variations

Select now
Customization options
Customized logo (Min. order: 1 piece)
Customized packaging (Min. order: 1 piece)
Graphic customization (Min. order: 1 piece)

Shipping

Shipping fee and delivery date to be negotiated. Chat with supplier now for more details.

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