Benthtop Lab 3 Three Targets Plasma Sputtering Coater , lab coating machine

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$1,000.00 - $8,000.00 / Sets | 1 Set/Sets (Min. Order)
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Threee Targets Plasma Sputtering Coater
Threee Targets Plasma Sputtering Coater
Place of Origin:
Henan, China (Mainland)
Brand Name:
Model Number:
Customized Size
Product name:
Threee Targets Plasma Sputtering Coater
Target size:
Diameter:45mm, Thickness:0.12mm
Vacuum specimen chamber:
Diameter:160mm, Height:120mm
Sputtering area:
dia. 45mm, three areas
Vacuum gauge:
Max. vacuum degree ≤4X10-2 mbar
Plasma ampere meter:
Max. current 50mA
1 year
1 Year
After-sales Service Provided:
Engineers available to service machinery overseas
Supply Ability
Supply Ability:
300 Set/Sets per Month
Packaging & Delivery
Packaging Details
standard export package
China port
Lead Time :
within 10 days

Benthtop Lab 3 Three Targets Plasma Sputtering Coater  , lab coating machine

Product Description

Brief introduction of the 3 targets plasma sputtering coater:

TCH-GSL1100X-SPC16-3 3 Targets Plasma Sputtering Coater is a CE certified compact plasma sputtering coater. This machine is basic on dipolar (DC)sputtering principle designed, it's a sample, reliable, low cost coating equipment. It's special because it has 3 targets in the vacuum chamber. Rotary sample board, can coating three kinds of materials on the same sample in turn. Suit for manufacture all kinds of complex film sample in the laboratory, also can make the non-conductor material testing electrode.


Features of the three targets plasma sputtering coater:

1. Sample sputtering chamber vacuum gauge and sputtering ampere meter, to indicate and monitor instrument‘s condition
2. Sputtering current adjustable controller, micro vacuum gas valve. When working combine with the internal automatic control circuit can easily control the pressure in the vacuum chamber, ionization current and arbitrary select the required ionized gas,
to obtain the best coating effect.
3. Particular designed bell edge rubber seal ring, can make sure to have a long term usage and can't appear the "brokenedge"phenomenon to effect the sample sputtering chamber vacuum degree;
4. Ceramic seal high pressure head is more durable than the rubber seal.
5. According to gas ionization character in the electric field,
using the high-capacity sample sputtering chamber and corresponding area sputtering target, to make the coating film more uniform and pure.


Technical parameter of the three target plasma sputtering coater:

1. Target(upper electrode):Diameter:45mm; Thickness:0.12mm
Vacuum specimen chamber:Diameter:160mm; Height:120mm
Sputtering area:Dia.45mm, three areas
Vacuum gauge:Max. vacuum degree:≤4X10-2 mbar
Plasma ampere meter:Max. current:50mA
6. Timer:Longest time:900S
Compact vacuum valve:can connect withφ3mm flexible tube
Allowed gas:all kinds
Max. voltage:-1600(-3000)DCV
Mechanical pump:2L/S


Optional parts:

All kinds of target materials


reference picture of the three targets plasma sputtering coater:

the single target plasma sputtering coater we have:

other lab thin film coating machine we have:




Company Information

Zhengzhou TCH Instrument Co., Ltd. is established with the goal of providing researchers with specialized instruments designed to meet their unique demands. We has grown into one of the material science market’s sources of quality instruments overseas. Although the work of the research community has changed quite a bit over the last years,Zhengzhou TCH Instrument Co., Ltd , through constant innovation, continues to provide the highest-quality instruments and unparalleled service, to meet and exceed all of our customers’ needs.

Zhengzhou TCH Instrument Co., Ltd is a leading developer of lab instruments and related products. Our products are used by lab research professionals worldwide. Throughout our history Zhengzhou TCH Instrument Co., Ltd has been synonymous with quality.


Please don't hesitate to contact us for the quotation!


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