Machine Type
magnetron sputtering coater
Video outgoing-inspection
Provided
Machinery Test Report
Provided
Marketing Type
New Product 2020
Warranty of core components
1 Year
Place of Origin
Henan, China
Key Selling Points
Competitive Price
Applicable Industries
Manufacturing Plant
Dimension(L*W*H)
1090mm X 900mm X 1250mm
Machine Type
Coating Equipment
Product name
Three-target magnetron sputtering coater with vibrating sample stage
Sample stage size
150mm dia.
Sample stage size vibration method
Inverter motor drive gear
Magnetron sputtering head
Three 2-inch magnetron sputtering heads
Vacuum chamber size
300mm Dia.X 340mm H
Gas flow controller
1 road 200sccm Ar
Vacuum pump
a molecular pump system, pumping speed 600L/S
Thickness meter
A quartz vibrating film thickness gauge
Sputtering power supply
2DC*500W 1RF*500W