DXV-300 Magnetron Sputtering Machine/vacuum Coating System

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$30,000.00 - $40,000.00 / Sets | 1 Set/Sets (Min. Order)
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Overview
Quick Details
Condition:
New
Type:
Coating Production Line
Coating:
Vacuum Coating
Place of Origin:
Fujian, China (Mainland)
Brand Name:
DX
Model Number:
DX-300
Voltage:
380V
Certification:
CE ISO9001
High vacuum stainless steel chamber:
Approx.dia.300mm*300mm
Inspection window and flanges:
RF100
Rotating substrate frock:
dia.4 inches substrate stage
Substrate stage heating system:
Room temperature to 500℃, controllable and adjustable
Chamber barking:
Barking temperature: 100℃
Molecular pump:
600L/s
Mechanical Pump:
4L/S
High quality flow controller:
Rang 0-100SCCM Range 0-20SCCM
Warranty:
1 Year
After-sales Service Provided:
Engineers available to service machinery overseas
Supply Ability
Supply Ability:
5 Set/Sets per Month
Packaging & Delivery
Packaging Details
Wooden.box.carton.or Customer Requirment
Port
Xiamen port
Lead Time :
Shipped in 60 days after payment

 

 

DXV-300 Magnetron Sputtering Machine


 

 

Introduction

The system is a high vacuum multifunctional three target magnetron sputtering machine. It is apply for the preparation of nanoscale monolayer and multilayer functional film and composite membrane, which could coat metal film, alloy membrane, compound membrane, semiconductor membrane, ceramic membrane (need radio-frequency power supply), dielectric composite membrane and other chemical reaction film. System mainly consist of sputtering chamber, permanent magnet magnetron sputtering targets ( three targets), full-automatically matching RF power supply, DC power supply, sample stage, sample heating furnace, pump exhausting, vacuum measuring system, gas system, electrically control system and so on.

 

 

  1. Ultimate Vacuum of Sputtering Chamber: 6.67*10-5Pa ( after continuously baking and degassing)

 

Vacuum acquisition adopts molecular pump (600L/S), high quality mechanical pump (4L/S) and CF manual gate valve, which has the characteristics of quick speed to gain high vacuum environment and offer cleanliness of film.

 

Leak Detection Rate of System 5.0*10-7Pa.l/S

 

System begins air exhausting from atmosphere and sputtering could reach 6.6*10-4Pa in 25 minutes.

 

Vacuum Degree 5Pa after stopping pumping 12 hours

  1. Sputtering chamber is equipped with 2 set 2 inches high performance permanent magnet confocal magnetron sputtering target. Each target could independently or in order or together works. Magnetron target is cooled by water and adopts target upward and sputtering downward into film. RF, DC and MF of magnetron target could be compatible, which could sputter magnetic materials. The magnetron target has the structure of manual baffle.
  2. The sample stage is in the bottom of vacuum chamber, where could put one pieces 4 inches sample at MAX. The sample has the function of continuously rotating, rotating 0-30r/m. which is continuous and adjustable.
  3. The heating device heats on the imported resistance wire. The heating temperature: -500℃. It is controlled by thermocouple closed and feedback, which is adjustable and controllable.
  4. Vacuum measurement adopts compound vacuum gauge.
  5. System is equipped with two-way input red-y compact series MFC control air intake system (Ar 02). The flow is 100SCCM and 20SCCM.
  6. The pressure control of coating technology adopts manual gate valve and imported MFC control.
  7. System is equipped with one set 500W full-automatic matching RF power supply.
  8. System is equipped with one set imported 500W power supply.
  9. System is equipped with film thickness monitor.

 

Function and Composition of System

This system is single chamber structure, mainly consist of sputtering chamber, magnetron sputtering target, rotation substrate stage, heating system, imported DC power supply, automatic RF power supply, working air channel, vacuum acquisition system, installation cabinet, vacuum measuring system, water cooling, alarm system and control system, which could apply for metal film and dielectric film.

 

Main components and Technical Index of Equipment

Ultimate Vacuum of Sputtering Chamber: 6.6*10-5Pa ( after continuously baking and degassing)

 

Leak Detection Rate of System <5.0*10-7Pa.l/S

 

System begins air exhausting from atmosphere and sputtering could reach 6.6*10-4Pa in 25 minutes.

 

Vacuum Degree 5Pa after stopping pumping 12 hours

 

1. Sputtering Vacuum System                            1 set            

Vacuum chamber is upright and up cover structure, size: φ 300mm*300mm, made of stainless steel, argon arc welding, surface after electrochemical polishing passivating treatment. Connections adopt metal washer or fluoro-rubber to seal. The chamber is opened by air cylinder which make easily for change of targets. Various of flanges of chamber as following:

 

Name

Model

Qty

Application

flange connector

RF100

1

connect to viewing port

flange connector

CF16

2

1 channel intake-tube, deflation valve

flange connector

CF100

1

connect to molecular pump

flange connector

RF300

1

For installing magnetron target and target baffle

sample stage flange connector

 

1

To install sample stage

flange connector

CF35

1

connect to side pump

 

2. Magnetron Sputtering System                         3 sets

2.1 Target size: 2 inches

2.2 Offer targets: 3 stainless steel testing targets

2.3 Permanent magnet target (it is compatible with magnetic materials), RF sputtering and DC sputtering are compatible. Water cooling in target.

2.4 Assembly of manual control baffle: 3 sets

2.5 Target on the above, sputtering downwards, confocal magnetron sputtering target. Each targets could independently or in order work.

2.6 500W full-automatic matching RF power supply 1 set

2.7 500W DC power supply one set.

 

3. Rotating substrate stage                              1 set

3.1 The size and quantity of substrate: 4 inches sample, one piece for each

3.2 The substrate is heated by imported heater strip. The heating temperature: room temperature-500℃,which is controlled by thermocouple closed loop feedback, and adjustable and continuous.

3.3 The rotation of substrate is driven by motor, 0-30 r/m, continuously adjustable.

 

4. Window and components of flange interfaces             1 set

4.1 RF100 glass window: 1 piece

4.2 CF35 ceramics sealing-in feedthrough flange (lighting and inside baking lead): 1 piece

4.3 Blank flange: CF35 one piece

 

5. Heating device                                       1 set

The heating device is on the flange on the bottom of vacuum chamber, which achieve closed-loop-control by thermocouple to control temperature control power supply.

 

6. Working gas circuit                                   1 set

6.1 100SCCM, 20sccm mass flow controller, CF16 manual globe valve, pipeline, connectors and so on, together 2 channels

6.2 DN16 manual inflation valve, pipeline, connectors and so on: 2 channels

 

7. Air bleed set, valve and pipeline                         1 set

7.1 compound molecular pump and frequency conversion control power supply: 1 set

7.2 Mechanical pump: 4L/S   1 set

7.3 DN40 electric check valve: 1 set

7.4 Side pipe channel of molecular pump and mechanical pump: 1 set

7.5 CC100 manual gate valve: 1 set (used for separating compound molecular pump and mechanical pump).

7.6 Differential pressure inflation valve: 1 set

 

8. Installation machine assembly                           1 set

It is made by welding of excellent square steel. The surface is spraying process. The surface of machine is decorated by stainless steel skin. It has four trundles which could be moved or fixed.

Cable bearer: 1 set

 

9. Vacuum Measurement                                1 set

The sputtering vacuum adopts ZDF5227 compound meter to measure.

 

10. Spare parts                                        1 set

 

11. Control model: manual operation control                 1 set

 

12. Film thickness detector                                 1 set

 

Configuration

 

NO.

Name

Parameters

Quantity

1

High vacuum stainless steel chamber

Approx.φ300mm*300mm

1 set

2

Antifouling lining of Chamber

 

1 set

3

Inspection window and flanges

RF100

1 set

4

Chamber illumination

 

1 piece

5

Rotating substrate frock

Φ4 inches substrate stage

1 set

6

Rotating motor and power supply

 

1 set

7

Substrate stage heating system

Room temperature to 500℃, controllable and adjustable

1 set

8

Chamber barking

Barking temperature: 100℃

1 set

9

Temperature measuring, control system

Temperature controller, PID temperature control, adjustable and controllable

1 set

10

Electrode

CF35 four cores

1 set

11

Molecular pump

600L/s

1 set

12

Mechanical Pump

4L/S

1 set

13

Manual gate valve

CC-100

1 set

14

Electric check valve

DF40

1 piece

15

Side pump angle valve

CF35

1 piece

16

CF16check valve

Manual

1 set

17

CF16 check valve

Manual

1 set

18

Vacuum pump line

Stainless steel three direct links and corrugated pipe

1 set

19

Vacuum Gauge

ZDF5227

1 piece

20

Permanent magnet target

Normal target ( compatible with strong magnetic target)

3 pieces

21

Magnetron target connecting pipes assembly

 

3 pieces

22

Baffle of target

Manual

3 pieces

23

500W RF sputtering power supply

Full automatic matching

1 set

24

500W DC power supply

Digital

1 set

25

High quality flow controller

Rang 0-100SCCM

Range 0-20SCCM

1 channel

26

Temperature control power supply system

 

1 set

27

Master control power supply

Molecular pump, mechanical pump, solenoid valve, hydraulic pressure alarm, illumination barking, substrate rotating, matrix heationg, interlocking control system and so on.

 

28

Gas pipe, gas connector pipes

Mental pipes

1 set

29

Installing rack

Surface spraying, equipped with trundles and door

1 set

30

Targets

Test targets

3 pieces

 

The condition of field installation

1. Power supply: 380V 50Hz, 16A air switch

2. Ground: below 3 Ω, diameter of line: 14mm2*1

3. The dimension: 700*1040*1400 (width*length*height)

4. Cooling water:

Pressure: 1.5-2kg/cm2. The pressure difference between inlet and outlet is above 1kg/cm2

Flow speed: 25-30L/M filtration soft water

Temperature: 20-22℃

Water quality: filtration soft water

Specification of connectors: 1”PT female end*2

 

Technical service and Quantity guarantee

1. According ISO9001 to design, manufacture, adjust, test, pack and ship.

2. Offer the manual and direction of outsourcing accessories.

3. Freely maintain the problems caused by normal usage. As for the problems caused by improper, just charge cost of production. Charge cost of production for life maintenance.

 

Training

1. Training time: one week

         People: 2-3

2. Training and requirements

1) Understanding the working principle, constitute and each part’s module of equipment, control system’s

working principle and using method.

2) Familiar with the operation of the whole set

3) Could diagnose general malfunction and maintain. Could change the quick wear part

4) Could maintain the equipment everyday

 

 

 

Packaging & Shipping

 All cargo with standard export packing; If you need special package please let us know.             

Company Information

 

Certification

 

 

FAQ

 

1. Q: What payments are you accept?

     A: We accept T/T most of the time, and that also can be L/C, Western Union and Paypal.


2. Q: Are you a manufacturer?

     A: Yes, we are a manufacturer and have our own factory.

 

3. Q: Can you customize the product according to my requirements?

     A: Yes, we have professional technical team and rich experience in this field, which allow us to provide special service to meet the requirements of different customers.

 

4. Q: How long is delivery time? Does the sample is available?

     A: Yes, the sample is OK; The delivery time of sample is 3-7 days, the delivery time of cargo is 7-15 days.

 

More questions we can discuss together!

Welcome to contact us and hope we can have a fine cooperation!

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