Lab Nano material researching thin film coating vacuum furnaces instrument

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$3,250.00 - $21,350.00 / Sets | 1 Set/Sets (Min. Order)
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Overview
Quick Details
Classification:
Laboratory Heating Equipments
Brand Name:
CY
Model Number:
CY-O1200-60-4CLV-PE
Place of Origin:
Henan, China (Mainland)
name:
vacuum furnaces
usage:
Preparation of graphene, nano materials, oxide preparation
features:
plasma enhanced chemical vapor deposition
working temperature:
1150℃
heating zone:
440mm
tube length:
1400mm
heating zone number:
single
display mode:
manual screen
heating element:
K type
power supply:
AC:220V 50Hz
Supply Ability
Supply Ability:
200 Set/Sets per Month
Packaging & Delivery
Packaging Details
plywood box, or as customer request
Port
QINGDAO, SHANGHAI ,TIANJIN, NINGBO
Lead Time :
Shipped in 15 days after payment
Product Description

Nano material researching thin film coating vacuum furnaces instrument of laboratory

Application of vacuum furnaces

 

PECVD systems are capable of depositing high quality SiO2, Si3N4, or DLC films on up to 3” diameter substrate sizes. To generate plasma, it uses RF shower head electrode or Hollow Cathode RF plasma source with Fractal Gas Distribution. The platen can be biased with RF or Pulsed DC and it is heated resistively or cooled with chilled water circulation. The chamber is evacuated to low10-7 torr pressure using 250 l/sec turbomolecular pump backed with 3.5 cfm mechanical pump. Standard unit comes with one inert gas, three reactive gas lines and four mass flow controllers. The planar Hollow Cathode Plasma source with its unique gas distribution system makes it possible to meet wide range of requirements such as plasma density, uniformity and separate activation of reactive species to cover the broadest possible deposition parameters

 

Featrues of vacuum furnaces

1.Stainless steel RF power and Aluminum chamber furnace

2.Vacuum 10-7torr range base pressure

3.RF shower head, Mircowave plasma sources

4.RF biased substrate houlder

5.Water cooled system

6.Heated platern up to 800 degree

7.Pneumatically controlled valves

8.PC controlled with lab view

9.Up to 4 MFC'S with vented box and gas manifolds

 

Technical parmaters of vacuum furnaces

 

Plit Tube furnaceInput power: 208 – 240V AC, 1.2kW
1200°C Max. working temperature for < 60 minutes
1100°C Max for continuous heating
High purity quartz tube 2"OD x 1.7"ID x  39.4" Length 
30 segments programmable precision digital temperature controller
8" (200mm), single zone. 2.3" (60mm)  (+/-1°C) @ 1000°C 
Plasma RF GeneratorOutput Power:5 -300W adjustable with ± 1% stability
RF frequency: 13.56 MHz ±0.005% stability  Reflection Power: 200W max.
Matching:                 Automatic
RF Output Port:        50 Ω, N-type, female
Noise:                      <50 dB. 
Cooling:                    Air cooling. 
Power :                     208-240VAC, 50/60Hz
Vacuum Flange and FittingsVacuum flange set is made of stainless steel 304. 
Left flange assembly includes a KF-25 vacuum port,  two KF-25 
quick clamp,
A KF-25 right angle valve, a KF-25 vacuum bellows, a flange 
Support 1/4 O.D 
Hose fitting, and a needle valve.
Right flange assembly includes a digital pirani gauge, 1/4 O.D 
tube fitting, 1/4"
Feedthrough and a needle valve.
Vacuum Pump AC 220V 50 Hz  1/2HP  375W
2 Liter /S  or 120 liter/m 
Oil trap (inlet) and exhaust filter (outlet) are installed.
Max. vacuum:  10-2 torr
Warranty 12 month (exclusive wearing part)

 

 Pictures show of vacuum furnaces

Packaging & Shipping

Packaging of vacuum furnaces

PLY WOOD BOX as below picture show. or as customer request.

Shipping and transportation

As customer request. Generally, Our mode of transport are as by sea, by air or rail transport

Our Services

Payment

T/T, L/C, WEST UNION, PAYPAL, ESCROW AND ETC

Warranty

Main product is 12 month, except wearing parts

Company Information
 

Factory show

Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design,

manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.

 

 

Contact information

 

Email: cy-jenny (at) cysi.wang

Fax:0086-0371-86036875

Website:www.cysi.wang

We are always at our service in 24 hours

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