Models
Suffix S - closed loop
Suffix K - open loop
P21.R7S
P21.R7K
Unit
Active axis
θz
Rotation angle(0~+120V)
6(≈1240")
mrad±20%
Rotation angle(0~+150V)
7.5(≈1500")
mrad±20%
Sensor type
SGS/-
Resolution
0.4(≈0.085")
/0.2(≈0.04")
μrad
Closed-loop linearity
0.5/-
%F.S.
Closed-loop repeatability
0.2/-
%F.S.
Push/pull force
10/5
N
Stiffness in motion direction
1
N/μm±20%
Unloaded resonant frequency
1.1
kHz±20%
Unloaded step time
30/1.5
ms±20%
Closed-loop unloaded operating frequency
10% travel
50
Hz±20%
100% travel
15
Load capacity
0.1
kg
El.capacitance
1.8
μF±20%
Material
Aluminum
Mass
105
g±5%
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
E01.D1 Piezo Controller
1 channel
Open/closed loop Ave.current: 291mA
E63.C Piezo Controller
1 channel
Open loop Bandwidth: 700Hz(-3dB)
E53 Piezo Controller
1 channel
Open/closed loop Ave.current: 60mA
XP-721 Piezo Scanner
100μm travel range
Load to 200g
Resolution to 3nm
N50 Piezo Rotation Stage
Theta X, theta Z motion
Tilt angle up to ±0.25mrad Load to 60kg
Ring Piezo Actuaotr
Max travel range to 47um
Blocking force to 5300N Aperture: 9/14mm