マシンタイプ
magnetron sputter thermal evaporation
マーケティングタイプ
New Product 2022
SUS Chamber
diam300mm*300mm
Sample stage
diam185mm,20rpm
Magnetron sputter head
2-inches*2
Evaporation source
tungsten wire basket,1500℃
Vacuum gauge
Resistance gauge + ionization gauge
Molecular pump
Turbo molecular pump 600L/s
Mechanical pump
Rotary vane pump 1.1L/s