type
chemical vapor deposition
Machine Type
chemical vapor deposition
Video Uitgaande-Inspectie
Verstrekt
Machines Testrapport
Verstrekt
Marketing Type
Hot Product 2019
Garantie Van Core Componenten
1 Jaar
Core Componenten
Pomp, RF power
plaats van herkomst
Henan, China
Key Selling Punten
Concurrerende Prijs
Toepasselijk Industrie
lab
Afmetingen( l* w* h)
1100mm *800mm *1100mm
Product name
PECVD vacuum coater
Application
depositing thin films of silicon nitride, amorphous silicon
Chamber material
stainless steel
Chamber size
diam300mm X 300mm
viewing window
diam100mm with baffle
Vacuum pump
rotary vane pump+Turbo molecular pump
Vacuum(deposition)
0.133~133Pa
RF power
13.56MHz,500W (automatch)
Flow control
mass flowmeter(default Ar,0~200sccm)