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MEMS 3 axis accelerometer are usually available in electromagnetic and variable capacitance types. Here is a rundown of some common types:
This one uses a mass suspended with a spring. Whenever a force is applied, the mass moves causing a change in the distance between the electromagnetic plates. The greater the acceleration, the larger the mass distance separation resulting in a measurable change in capacitance.
The variable capacitance sensor incorporates an accelerator mass connected to two capacitor plates. When acceleration occurs, the mass shifts that changes the overlap between the plates. This affects capacitance, which is measured and converted to acceleration.
The piezoelectric accelerometer contains a piezoelectric element like quartz that gets deformed whenever a mechanical stress is applied. This stress results from acceleration. The deformation generates an electrical charge proportional to the applied acceleration.
The strain gauge accelerometer consists of a mass attached to a spring with strain gauges fixed to the spring. When acceleration is applied, the spring bends. This bending causes the strain gauge to stretch or compress. Whenever the strain gauge stretches or compresses, a resistance change occurs, which is converted to an acceleration value.
The thermal 3d accelerometer features a heat source at its center with temperature sensors added on its edges. The thermal one uses a heat element and detects temperature. When acceleration is applied, the heat element displaces, affecting the thermal flow. This causes the temperature at the peripheral sensors to vary. The variation is measured and converted to an acceleration value.
MEMS 3d accelerometer finds a place in all industries today. Here is a list of these industries:
3D accelerometers have the main role of screen orientation adjusting, motion sensing, and fall detection in mobile phones, tablets, wearable devices, and gaming consoles.
In the automotive industry, these accelerometers are used to help with airbag deployment, stability control, crash detection, and keep track of vehicle motion. Also, they are used for vibration monitoring and analyzing the health of vehicle components.
In the aerospace and defense industries, the MEMS 3d accelerometers help track inertial navigation and guidance in absence of GPS, and vibration analysis of aircraft and spacecraft. Furthermore, these sensors aid in monitoring the structural integrity of the defense equipment and vehicle.
In the health field, these 3 axis accelerometers are used in multiple medical devices to keep track of the patient’s physical activity, and fall detection and mobility monitoring. Moreover, they are used in biomedical implants to monitor vital functions and keep track of drug delivery systems.
The 3 axis accelerometers are widely used for vibration analysis, fault detection, and equipment condition monitoring. This makes them key components in predictive maintenance and industrial monitoring.
These sensors are 3D accelerometers used for motion control, stability, and trajectory estimation in the area of robotics and drone.
Measurement Range
The measurement range refers to the acceleration range a sensor can measure. For 3D accelerometers, the range is measured in g, where 1g = 9.81 m/s2, the typical value of earth acceleration.
Sensitivity
Sensitivity refers to the capability of a 3D accelerometer to detect the slightest change in acceleration. Higher sensitivity is better for applications that need high precision measurement, such as image stabilization and navigation.
Bandwidth
Bandwidth is the frequency range over which the 3D accelerometer can operate. Usually, this is from a few hertz to a couple of kilohertz for common 3D accelerometers. A 3d accelerometer with broad bandwidth is fitting for applications that require capture of fast motion.
Noise Density
The noise density defines the amount of random noise present in an accelerometer's output per square root of bandwidth. Noise density is typically expressed in terms of micro g/Hz 1/2.
Scale Factor
It is the ratio of the output to the input. In the case of an accelerometer, the scale factor is the sensitivity of the accelerometer. Normally, the scale factor is expressed in unit volts per g.
A1. 3D MEMS accelerometers measure acceleration along three orthogonal axes using micro-electro-mechanical systems technology, while conventional accelerometers measure acceleration along a single axis or two. The three-dimensional measurement capability makes them better for complex motion tracking.
A2. In smartphones, 3D MEMS accelerometers are used for screen orientation, motion sensing, and shake detection for application activation and game control. They are components of augmented reality and virtual reality frameworks for motion tracking.
A3. MEMS 3D accelerometers utilize electromechanical systems like variable capacitance, piezoelectric, electromagnetic, strain gauge, and thermal acceleration sensors to measure acceleration by detecting changes in motion, vibration, or tilt along three axes, which are then converted into an electrical signal.
A4. 3D MEMS accelerometers are designed to withstand harsh conditions like temperature variations, humidity, and strong vibrations. Some models are specifically engineered for aerospace or industrial applications to guarantee enduring performance in adverse situations.
A5. Motion monitoring and measurement are crucial in MEMS 3D accelerometers because they allow the detection of dynamic changes in orientation, tilt, and vibration. These measurements are essential for applications such as stabilizing images, navigation, and motion capture, providing valuable data for various technologies.